On the other hand, the capacitance of NC Ge layer decreases with increasing dot size according to Equation 8 and leads to a larger voltage drop across the NC Ge layer. It implies a lower voltage drop across the tunneling oxide layer and a smaller charging current. The phenomenon about the charging current observed in Figure 2 is a compromise between the effects of the lowest conduction states and the capacitance of NCGe layer on the tunneling. Figure 2 Average number of electrons per NC Ge dot and charging current. Average number of electrons per NC Ge dot and charging current selleck chemicals llc as a function of
dot size at different charging times. Figure 3 depicts how the stored charge in the NC Ge layer changes with dot size at different charging times. One can find that the stored charge in the NC Ge layer initially rapidly increases, then saturates, and lastly, very slowly decreases with increasing dot size at any given charging time. In order to validate the theory, a comparison between the theoretical data using the parameters in [7] and experimental data from the same study [7] is given as the
inset figure. The inset figure clearly illustrates that the qualitative theory agrees well with the experiments. The deviance in quantity might origin from the charge captured by the defects in the oxide and NC Ge layer, selleck kinase inhibitor inappropriate data about effective electron mass for the oxide and NC Ge layer, barrier height between silicon substrate and ultrathin tunneling oxide layer used in the calculation, and overestimation of the capacitance of the NC Ge layer. Figure 3 The stored charge in the NC Ge layer as a function of dot size at different charging times. Comparison between theoretical and experimental Baf-A1 manufacturer is given as the inset. Conclusions In conclusion, the stored charge and the charging current of NC Ge memory devices with the mean diameter of NC Ge being uniquely controlled by the nominal thickness of the deposition of Ge layer using molecular beam epitaxy are initially increased, then saturated
and lastly, decreased with increasing dot size. It is caused by a compromise between the effects of the lowest conduction states and the capacitance of NC Ge layer on the tunneling. Theoretical analysis also demonstrates that the voltage across the tunneling oxide layer is initially kept constant, then slowly decreased and lastly, rapidly decreased with charging time. It is worthy of being noted that NC Ge memory devices may suffer from a small charging current, especially on a few nanometers, due to the change in the lowest conduction states and the capacitance of NC Ge layer. Authors’ information LFM received the Ph.D degree in microelectronics and Solid State Electronics from the Peking University, Beijing, People’s Republic of China in 2001. He is a professor in Soochow University.